Research Topics

The department of Technological Electronics works on the research and development of devices and methods in the field of optoelectronics and MEMS technology (micro-electronical-mechanical-systems). Further research includes projects on thin film technology, spectroscopic sensorics and information/safety engineering.

To meet the requirements of those tasks cleanroom processes are enhanced for implementation or new process technologies are developed and investigated. State of the art technique like high resolution templates for nanoimprint technology or focused ion beams (FIB) and plasma assisted processes are in use at INA for research on nanostructures.

During the development of devices and structures the creation and improvements of designs base on numerical simulations of optical, electrical, mechanical, thermal or quantum mechanical properties.

Extensive analytical equipment at the institute is employed for precise characterization of samples with respect to process and application parameters.

The field of activity at INA covers the span from high-end technologies (EUVL, compound semiconductors, nanoimprint, plasma processing) to low-cost designs aimed at large area implementations. At this the relationship of scientific research with direct applications and industry cooperations is of particular importance for us.

Current Projects

• A Novel Technology for Highly Sensitive Gas Sensors
• High Resolution 3D Nanoimprint Stamps and Nanoimprint Technologies 
• Optical Sensor Arrays
• Micro Mirror Arrays for Large Area Applications
  
• Tunable Fabry-Pérot Filters
• Vertical Cavity Surface Emitting Laser (VCSEL) for the UV Range
• Save and reliable structures
• Quasi-Monolithic Integration for High-Frequency Applications
• Extreme Ultraviolet Lithography (EUVL)
• Photonic Crystals
• Nanostructures and Art
• Tunable Optical Sensor Array (TOSA)
• NanoImprint Pharmakon (NIP)

Publications