Current Projects
Overview
- A Novel Technology for Highly Sensitive Gas Sensors
- High Resolution 3D Nanoimprint Stamps and Nanoimprint Technologies
- Optical Sensor Arrays
- Micro Mirror Arrays for Large Area Applications
- Tunable Fabry-Pérot Filters
- Vertical Cavity Surface Emitting Laser (VCSEL) for the UV Range
- Save and reliable structures
- Quasi-Monolithic Integration for High-Frequency Applications
- Extreme Ultraviolet Lithography (EUVL)
- Photonic Crystals
- Nanostructures and Art
- Tunable Optical Sensor Array (TOSA)
- NanoImprint Pharmakon (NIP)
