INA - Technological Electronics > Education > Practicum Microsystem Technology

FB 16 #2217 Practicum Microsystem Technology

A registration in HIS or OKA is mandatory and urgently required for the participation in one of our labs. The registration should be done right in the beginning of each semester!



Theory:
The students will experience a complete hands-on fabrication process for different micromechanical structures. It is intentionally simplified with respect to all involved machines to allow an intuitive access to all sub-processes and all essential process parameters.

Experiments:

Cleaving, cleaning and preparation of samples.

Transfer of structures into a photoresist (spin coating, exposure, development and sacrificial layer etching).

Monitoring of structures with the microscope (quality control).

Kick-off meeting

Kick-off-meeting is going to be on Wednesday 31st May, 2017 at 2pm.

 

Please come to INA, Heinrich-Plett-Straße 40, 3rd floor, room 3107.

  

Important: It is mandatory to attend the kick-off meeting. You will not be allowed to join the lab without attending.

Goals

Students will learn

  • the methodology of the fabrication of micromechanical structures
  • involving sacrificial layer technology
  • cleaving and cleaning of substrates correctly
  • understanding the basics of photolithography
  • geometric characterization using calibrated standards in the ocular of an optical microscope.

What you will gain from the practicum

  • You will learn from this practicum the fabrication and handling of microstructures which is the requirement for working in the clean room.
  • You will know how to cleave and prepare samples accurately and how to work with microscope and take precise measurements.
  • You will learn how you can spin coat a photoresist and how you transfer a structure to a sample with uv light.
  • Team-based working experience in a modern research environment.

Course prerequisite

Those who have attended or are attending the Microsystem Technology lecture are invited to participate in the practicum.

Literature

  • S. Büttgenbach: Mikromechanik - Einführung in Technologie und Anwendungen, 2. Aufl., Teubner Verlag, 1994
  • W. Menz und J. Mohr: Mikrosystemtechnik für Ingenieure, 2. Aufl., VCH Verlag, 1997
  • Dossier: Mikrosystemtechnik, Spektrum der Wissenschaften, Sonderband 4
  • A. Heuberger: Mikromechanik, Springer Verlag, 1991
  • H. I. Smith: Submicron- and nanometer-structures technology, 2nd edition, NanoStructures Press, 437 Peakham Road, Sudbury, MA 01776, USA, 1994
  • D. V. Morgan and K. Board: An introduction to semiconductor microtechnology, 2nd edition, John Wiley & Sons, Chichester 1994

Curriculum

This practicum is part of the modules:

a) ET Master - Mikrosystemtechnik

b) ECE Master - Hardware Components for Communication Systems R4a

Registration for the practicum

Please register in HISLSF until Friday 23rd June, 2017 
Note that the deadline for the enrollment for the examination in OKA or HIS is possible until 7 days before this deadline.

 

For questions please contact Mr. Krumpholz
 
LINK HISLSF

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