INA - Technological Electronics > Education > Practicum Microsystem Technology

FB 16 #2217 Practicum Microsystem Technology

A registration in HIS or OKA is mandatory and urgently required for the participation in one of our labs. The registration should be done right in the beginning of each semester!

The students will experience a complete hands-on fabrication process for different micromechanical structures. It is intentionally simplified with respect to all involved machines to allow an intuitive access to all sub-processes and all essential process parameters.


Cleaving, cleaning and preparation of samples.

Transfer of structures into a photoresist (spin coating, exposure, development and sacrificial layer etching).

Monitoring of structures with the microscope (quality control).

Kick-off meeting

Kick-off-meeting is going to be announced soon in Moodle.


Please come to INA, Heinrich-Plett-Straße 40, 3rd floor, room 3107.


Important: It is mandatory to attend the kick-off meeting. You will not be allowed to join the lab without attending.


Students will learn

  • the methodology of the fabrication of micromechanical structures
  • involving sacrificial layer technology
  • cleaving and cleaning of substrates correctly
  • understanding the basics of photolithography
  • geometric characterization using calibrated standards in the ocular of an optical microscope.

What you will gain from the practicum

  • You will learn from this practicum the fabrication and handling of microstructures which is the requirement for working in the clean room.
  • You will know how to cleave and prepare samples accurately and how to work with microscope and take precise measurements.
  • You will learn how you can spin coat a photoresist and how you transfer a structure to a sample with uv light.
  • Team-based working experience in a modern research environment.

Course prerequisite

Those who have attended or are attending the Microsystem Technology lecture are invited to participate in the practicum.


  • S. Büttgenbach: Mikromechanik - Einführung in Technologie und Anwendungen, 2. Aufl., Teubner Verlag, 1994
  • W. Menz und J. Mohr: Mikrosystemtechnik für Ingenieure, 2. Aufl., VCH Verlag, 1997
  • Dossier: Mikrosystemtechnik, Spektrum der Wissenschaften, Sonderband 4
  • A. Heuberger: Mikromechanik, Springer Verlag, 1991
  • H. I. Smith: Submicron- and nanometer-structures technology, 2nd edition, NanoStructures Press, 437 Peakham Road, Sudbury, MA 01776, USA, 1994
  • D. V. Morgan and K. Board: An introduction to semiconductor microtechnology, 2nd edition, John Wiley & Sons, Chichester 1994


This practicum is part of the modules:

a) ET Master - Mikrosystemtechnik

b) ECE Master - Hardware Components for Communication Systems R4a

Registration for the practicum

Registration is possible starting from (to be announced soon).


Please note that a registration in HIS or OKA is mandatory and automatically a fixed registration for the participation in the practical training as well as a registration for the exam.


A detailed description how to register for the practical trainings can be found here (PDF).


Only the registration for ERASMUS students differs.

First you need to check in HIS for the exam number (Prüfungsnummer) which you can find, if you click on the corresponding practical training and scroll down to exams (Prüfungen) until you see it.

The exam number for the practical training Microsystem Technology lab is "119009".

Then go to the registration portal and register for ERASMUS. Click on your functions and then on registration for exams.

Here you will not find the names of the practical trainings (lectures or seminars) but the exam numbers. In this case, please register for number 119009.

In case you need further or more detailed information, please get in touch with the examination office and contact Ms. Wahdat there.


·         ECE-students enrolled from 2017 onwards need to register for exams via the HIS system

         (Login by HIS > My Functions  > Administration of exams)

·         ECE-students enrolled in summer term 2017 and before need to register for exams via so-called “OKA” 
          (Online Klausuranmeldung - Online Registration to Exams portal)


In case you have registered in moodle, you should note that this plattform is only to be used for information and organisation processes. The mandatory registration to finally participate in the practical training needs to be done in HIS or OKA.


For questions please contact Mr. Krumpholz

© INA 2018. Version: 05.12.2018 - Imprint | Sitemap | RSS-Feed