#2215 Mikrosystemtechnik Praktikum

(Mr.Waleed Al-Esayi, M.Sc.)

Theory:
The fundamental of Microsystems and the working with micro-electro-mechanical-systems (MEMS).

Experiment:

Cleaving of glass and of silicon wafer parts.

Underetching microstructures.

Observing the effect of stress on microstructures.

Goals

• Understanding structure miniaturization
• Preparing for clean room working
• Cleaving wafers and substrates correctly
• Accurate measurements: calibration of the set-up (Microscope)
• Measuring the bending of the structure and learning the effect of stress on microstructures.

What you will gain from the practicum

• You will learn from this practicum the proper working with microstructure which is the requirement for working in the clean room.
• You will know how to cleave wafers and samples accurately and how to work with microscope and take precise measurements.
• You will learn how underetching and what are the effects of stress on microstructures.
• Team-based working experience in a modern research environment.

General information

The student team is supervised by Mr. AL-Esayi, who is responsible for the coordination of the practicum for all participating students.

Course prerequisite

Those who have attended or are attending the Microsystem Technology lecture are invited to participate in the practicum.

Literature

• S. Büttgenbach: Mikromechanik - Einführung in Technologie und Anwendungen, 2. Aufl., Teubner Verlag, 1994
• W. Menz und J. Mohr: Mikrosystemtechnik für Ingenieure, 2. Aufl., VCH Verlag, 1997
• Dossier: Mikrosystemtechnik, Spektrum der Wissenschaften, Sonderband 4
• A. Heuberger: Mikromechanik, Springer Verlag, 1991
• H. I. Smith: Submicron- and nanometer-structures technology, 2nd edition, NanoStructures Press, 437 Peakham Road, Sudbury, MA 01776, USA, 1994
• D. V. Morgan and K. Board: An introduction to semiconductor microtechnology, 2nd edition, John Wiley & Sons, Chichester 1994

Curriculum

• Wahlveranstaltung für Elektrotechnik(Master) - Mikrosystemtechnik Praktikum FB16-2215
• Master ECE

First meeting

Fri 11.05.2012, 09:00-10:00, s.t., R3107, INA, HPS

Registration for the practicum

Please register in HISLSF until 10th May, 2012 and attend the kickoff meeting.
 
For questions contact Mr. Waleed AL-Esayi by email or by phone.
 
LINK HISLSF