INA - Technological Electronics > Education > Technology of Electronic and Optoelectronic Devices

Technology of Electronic and Optoelectronic Devices

(Prof. Dr. H. Hillmer)

The lecture is given in English.

Contents

Important materials for electronic and optoelectronic devices: semiconductors, glasses, polymers, metals.

The following technological methods and processes are presented:

  • Fabrication of glass fibres
  • Crystal growth: fabrication of semiconductor wafers, epitaxial deposition of thin semiconductor layers
  • Lithography: optical, X-ray, electron-beam, ion-beam
  • Plasma processing and vacuum technology: DC-, RF-, and microwave Plasma
  • Deposition techniques: evaporation and sputtering of conducting and insulating layers (e.g. metals and dielectrica)
  • Etching: wet-chemical etching, dry etching
  • Clean rooms: purpose, general operation and processing methods
  • Fabrication technology of electronic devices: the planar transistor, electronic integration, Moor´s law
  • Fabrication technology of optoelectronic components and devices: semiconductor lasers of different waveguide and resonator types, fabrication of grating structures in optical waveguides (e.g. in semiconductor lasers, fibres.)
  • Fabrication technology of micro-opto-electro-mechanical systems (MOEMS): using the technology tools of microelectronics for microsystems, chances for micromachined structures in optics and electronics
  • General technology philosophies: advantages and disadvantages of the miniaturization of components, devices and circuits

The course includes a guided laboratory tour in the clean room facilities of the Institute of Nanostructure Technologies and Analytics (INA).

Course targets

To learn basic principles of semiconductor technology including specific processes, methods and the required machines. The course is complemented by future perspectives, market visions and actual research topics. In addition to the presented detailed process steps, methodology is strongly focussed. The engineer should learn to solve problems using interdisciplinary analogies.

Literature

  • S. Büttgenbach: Mikromechanik - Einführung in Technologie und Anwendungen, 2. Auflage, Teubner Verlag, Stuttgart 1994
  • H. I. Smith: Submicron- and nanometer-structures technology, 2nd edition, NanoStructures Press, 437 Peakham Road, Sudbury, MA 01776, USA, 1994
  • H. Hultzsch (Herausgeber): Optische Telekommunikationssysteme, DammVerlag, 1996
  • H. Beneking: Halbleiter-Technologie - Eine Einführung in die Prozesstechnik von Silizium und III-V-Verbindungen Teubner Verlag, Stuttgart 1991
  • I. Ruge und H. Mader: Halbleitertechnologie, Serie Halbleiter-Elektronik, Band 4, Springer Verlag, 1991
  • J. Jahns, S. Helfert: Introduction to Micro- and Nanooptics, Wiley-VCH, Weinheim, 2012
  • L. F. Thompson, C. G. Wilson, and M. J. Bowden: Introduction to Microlithography, 2nd edition, ACS Professional Reference Book, American Chemical Society, 1994
  • D. V. Morgan and K. Board: An introduction to semiconductor microtechnology, 2nd edition, John Wiley & Sons, Chichester 1994
  • S. M. Sze: Semiconductor devices - Physics and technology, John Wiley & Sons, New York 1985
  • S. M. Sze: Modern Semiconductor Device Physics , John Wiley & Sons, New York 1998
  • W.M. Moreau: Semiconductor Lithography - principles, practices and materials, Plenum Press, 1991
  • G.P. Agrawal and N.K. Dutta: Long-Wavelength Semiconductor Lasers, Van Nostrand Reinhold, NewYork, 1986
  • U. Hartmann: Nanostrukturforschung und Nanotechnologie, Band 1: Grundlagen, Oldenbourg Verlag, München, 2012
  • U. Hilleringmann: Silizium-Halbleitertechnologie, 3. Auflage, Teubner Verlag, Stuttgart, 2002
  • H.-G.Wagemann, T. Schönauer: Silizium-Planartechnologie: Grundprozesse, Physik und Bauelemente, Teubner Verlag, Stuttgart 2003
  • H. Hillmer and T. Kusserow: Semiconductor Lasers, from Handbook of Lasers and Optics Chapter 11.3, 2nd Edition, Ed. F. Träger, Springer, ISBN-978-3-642-19408-5, pages 757-792
  • B. Bhushan (Editor): Springer Handbook of Nanotechnology, Springer Verlag Berlin Heidelberg, 2004 http://www.springerlink.com/content/m02080/
  • M. Wautelet et al.: Nanotechnologie, Oldenbourg Verlag München, 2008
  • N. Schwesinger, Carolin Dehne, Frederic Adler: Lehrbuch Mikrosystemtechnik: Anwendungen, Grundlagen, Materialien und Herstellung von Mikrosystemen; Oldenbourg Verlag München, 2009
  • O. Solgaard: Photonic Microsystems – Micro and Nanotechnology Applied to Optical Devices and Systems, Springer Science + Business Media, 2009
© INA 2017. Version: 15.11.2017 - Imprint | Sitemap | RSS-Feed